000			00497 a2200145 4500
080			_a533.5 _bM 181 H
245	1		_aHistory of vacuum science and technology _ba special volume commerating the 30th Anniversary of the American Vacuum Society, 1953-1983 _cedited by T.E. Madey and W.C. Brown
260			_aNew York _bAmerican Institute of Physics _c1984
650			_aVacuum Science
700			_aMadey, T.E., ed.
700			_aBrown, W.C., ed.
100			_a _d
300			_a168 p.
901			_a178639
999			_c66827 _d66827