000 00377nam a2200157Ia 4500
008 130513s9999 xx 000 0 und d
044 _aUSA
080 _a541.14
_bX-GF
245 _aPhotochemical Vapor Deposition
260 _bJohn Wiley & Sons
_c1992
270 _aNew York
_dNew York
362 _aJan - Dec,1992
362 _a+
901 _a210918
942 _2udc
_cBV
999 _c154851
_d154851