TY  - BOOK
AU  - Iniewski,Krzysztof
TI  - Integrated microsystems: electronics, photonics, and biotechnology 
T2  - Devices, circuits, and systems
SN  - 9781439836200 
PY  - 2012///
CY  - Boca Raton 
PB  - CRC Press
KW  - Microelectromechanical systems
KW  - Integrated optics
ER  -