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Nanoscale calibration standards and methods: Dimensional and related measurement

Wilkening, Gunter and Koenders, Ludger., ed

Nanoscale calibration standards and methods: Dimensional and related measurement - Weinhem Wiley-VCH Verlag GmbH 2005 - 519p.

Universal Decimal Class. No.: 53.089 / N157

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Nanoscale calibration standards and methods: Dimensional and related measurement